Recently, researchers from the Shanghai Institute of Optics and Fine Mechanics (SIOM) of the Chinese Academy of Sciences have proposed a source mask optimization (SMO) technique using the covariance ...

Imagine a machine so advanced it operates with light invisible to the human eye, etching circuits onto silicon wafers at scales smaller than a virus. This is the world of EUV lithography, a ...

The first lithography tools were fairly simple, but the technologies that produce today’s chips are among humankind’s most complex inventions. When we talk about computing these days, we tend to talk ...

Lithography light source provider Cymer has posted a net profit of $9.6 million for the second quarter of 2012, down sharply on the same period last year as the San Diego company increased its ...

These applications put forward stringent fabrication requirements, including dimensional accuracy, shape accuracy, and surface roughness. Two-photon lithography is a versatile technique capable of ...

Leading‑edge system-on-chip (SoC) designs at deep submicron nodes are stretching lithography and patterning capabilities across the entire manufacturing flow. Extreme ultraviolet (EUV) lithography has ...

Antwerp, Belgium – Extreme-ultraviolet lithography (EUVL) is positioned for commercial deployment in 2009, but several critical issues must be addressed to keep the technology on track, delegates to ...